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Monolithic integration of fine cylindrical glass microcapillaries on silicon for electrophoretic separation of biomolecules.


ABSTRACT: We demonstrate monolithic integration of fine cylindrical glass microcapillaries (diameter ∼1 μm) on silicon and evaluate their performance for electrophoretic separation of biomolecules. Such microcapillaries are achieved through thermal reflow of a glass layer on microstructured silicon whereby slender voids are moulded into cylindrical tubes. The process allows self-enclosed microcapillaries with a uniform profile. A simplified method is also described to integrate the microcapillaries with a sample-injection cross without the requirement of glass etching. The 10-mm-long microcapillaries sustain field intensities up to 90 kV/m and limit the temperature excursions due to Joule heating to a few degrees Celsius only.

SUBMITTER: Cao Z 

PROVIDER: S-EPMC3411555 | BioStudies | 2012-01-01

SECONDARY ACCESSION(S): 10.1063/1.4739075

REPOSITORIES: biostudies

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