biostudies-literatureJiang NEuropean Research Council2610-2620https://www.ebi.ac.uk/biostudies/studies/S-EPMC10153487biostudies-literatureUnknown5(9)Understanding the growth mechanisms of III-nitride nanowires is of great importance to realise their full potential. We present a systematic study of silane-assisted GaN nanowire growth on <i>c</i>-sapphire substrates by investigating the surface evolution of the sapphire substrates during the high temperature annealing, nitridation and nucleation steps, and the growth of GaN nanowires. The nucleation step - which transforms the AlN layer formed during the nitridation step to AlGaN - is critical for subsequent silane-assisted GaN nanowire growth. Both Ga-polar and N-polar GaN nanowires were grown with N-polar nanowires growing much faster than the Ga-polar nanowires. On the top surface of the N-polar GaN nanowires protuberance structures were found, which relates to the presence of Ga-polaNanoscale advancesComplications in silane-assisted GaN nanowire growth.PMC10153487716471Loeto KGhosh SOliver RAFairclough SMKusch GFrentrup MJoyce HJJiang NfalseComplications in silane-assisted GaN nanowire growth.Understanding the growth mechanisms of III-nitride nanowires is of great importance to realise their full potential. We present a systematic study of silane-assisted GaN nanowire growth on <i>c</i>-sapphire substrates by investigating the surface evolution of the sapphire substrates during the high temperature annealing, nitridation and nucleation steps, and the growth of GaN nanowires. The nucleation step - which transforms the AlN layer formed during the nitridation step to AlGaN - is critical for subsequent silane-assisted GaN nanowire growth. Both Ga-polar and N-polar GaN nanowires were grown with N-polar nanowires growing much faster than the Ga-polar nanowires. On the top surface of the N-polar GaN nanowires protuberance structures were found, which relates to the presence of Ga-pola2023-01-01T00:00:00Z2023 May2025-04-27T03:14:42.073Z2025-04-06T18:49:06.424ZS-EPMC101534873714379310.1039/d2na00939k