biostudies-literatureSingh SScience and Engineering Research Board196https://www.ebi.ac.uk/biostudies/studies/S-EPMC10937778biostudies-literatureUnknown191(4)Detection of volatile organic compounds (VOCs) from the breath is becoming a viable route for the early detection of diseases non-invasively. This paper presents a sensor array of 3 component metal oxides that give maximal cross-sensitivity and can successfully use machine learning methods to identify four distinct VOCs in a mixture. The metal oxide sensor array comprises NiO-Au (ohmic), CuO-Au (Schottky), and ZnO-Au (Schottky) sensors made by the DC reactive sputtering method and having a film thickness of 80-100 nm. The NiO and CuO films have ultrafine particle sizes of < 50 nm and rough surface texture, while ZnO films consist of nanoscale platelets. This array was subjected to various VOC concentrations, including ethanol, acetone, toluene, and chloroform, one by one and in a pair/mix Mikrochimica actaMetal oxide-based gas sensor array for VOCs determination in complex mixtures using machine learning.PMC10937778CRG/2022/006973Shukla RPS SAdak CKamble VBSingh SVarma PSreelekha GfalseMetal oxide-based gas sensor array for VOCs determination in complex mixtures using machine learning.Detection of volatile organic compounds (VOCs) from the breath is becoming a viable route for the early detection of diseases non-invasively. This paper presents a sensor array of 3 component metal oxides that give maximal cross-sensitivity and can successfully use machine learning methods to identify four distinct VOCs in a mixture. The metal oxide sensor array comprises NiO-Au (ohmic), CuO-Au (Schottky), and ZnO-Au (Schottky) sensors made by the DC reactive sputtering method and having a film thickness of 80-100 nm. The NiO and CuO films have ultrafine particle sizes of < 50 nm and rough surface texture, while ZnO films consist of nanoscale platelets. This array was subjected to various VOC concentrations, including ethanol, acetone, toluene, and chloroform, one by one and in a pair/mix 2024-01-01T00:00:00Z2024 Mar2026-07-17T01:03:26.659Z2026-07-12T03:12:11.636ZS-EPMC109377783847812510.1007/s00604-024-06258-8