biostudies-literatureUnknown14(32)Liu XThe Ag _<i>x</i> O thin film with various oxygen flow ratios (<i>R</i>[O₂]%) deposited by radio frequency magnetron sputtering (RFM-SPT) has been studied. While adjusting <i>R</i>[O₂]% from 0% to 30%, the Ag _<i>x</i> O thin film transitioned from metal to semiconductor and/or insulator with different transparent appearances on the surface observed using X-ray diffraction (XRD) and transmittance measurement. At high oxygen flow ratios, the Ag _<i>x</i> O film is multi-phased as a mixture of Ag^(II)O and Ag₂ ^(III)O₃. In addition, the work function (<i>ϕ</i>) of those samples changes from 4.7 eV to 5.6 eV as measured by photoelectron yield spectroscopy (PYS). The compositional and chemical state chRSC advances23215-23224https://www.ebi.ac.uk/biostudies/studies/S-EPMC11264336biostudies-literatureThe effects of oxygen flow ratio on the properties of Ag _<i>x</i> O thin films grown by radio frequency magnetron sputtering.PMC11264336Liu XYasuoka TLiu LKawaharamura TDang GTfalseThe effects of oxygen flow ratio on the properties of Ag _<i>x</i> O thin films grown by radio frequency magnetron sputtering.The Ag _<i>x</i> O thin film with various oxygen flow ratios (<i>R</i>[O₂]%) deposited by radio frequency magnetron sputtering (RFM-SPT) has been studied. While adjusting <i>R</i>[O₂]% from 0% to 30%, the Ag _<i>x</i> O thin film transitioned from metal to semiconductor and/or insulator with different transparent appearances on the surface observed using X-ray diffraction (XRD) and transmittance measurement. At high oxygen flow ratios, the Ag _<i>x</i> O film is multi-phased as a mixture of Ag^(II)O and Ag₂ ^(III)O₃. In addition, the work function (<i>ϕ</i>) of those samples changes from 4.7 eV to 5.6 eV as measured by photoelectron yield spectroscopy (PYS). The compositional and chemical state ch2024-01-01T00:00:00Z2024 Jul2025-06-01T01:16:04.508Z2025-06-01T01:16:04.508ZS-EPMC112643363904540010.1039/d4ra02039a