biostudies-literatureGuo Gthe National Key Research and Development Program of ChinaGeneral project of natural science foundation of Jilin provinceYouth Project of National Natural Science Foundation of ChinaScience and technology research project of Education Department of Jilin Prov-inceJilin Province Science and Technology Development Program Project1167https://www.ebi.ac.uk/biostudies/studies/S-EPMC11858985biostudies-literatureUnknown25(4)Photodetectors with broad spectral response and high responsivity demonstrate significant potential in optoelectronic applications. This study proposes a Si/Ge avalanche photodiode featuring nanostructures that enhance light absorption. By optimizing the device epitaxial structure and these nanostructures, a wide spectral responsivity from 0.4 to 1.6 μm is achieved. The results demonstrate that introducing surface photon-trapping nanoholes and SiO₂ reflective grating nanostructures increases the average light absorptivity from 0.64 to 0.84 in the 0.4-1.1 μm range and from 0.31 to 0.56 in the 1.1-1.6 μm range. At an applied bias of 0.95 V_br-apd, the responsivity reaches 17.24 A/W at 1.31 μm and 17.6 A/W at 1.55 μm. This research provides theoretical insights for designSensors (Basel, Switzerland)Research on High-Responsivity Si/Ge-APD in Visible-Near-Infrared Wide Spectrum with Light-Absorption-Enhanced Nanostructure.PMC1185898520190302062GX120041392022YFB3604702, 2018YFB180190220240101297JCJJKH20240646KJZheng KLv JZhao BGuo GLiang JChen WQin YChen YWang WWang XZhao YGao DfalseResearch on High-Responsivity Si/Ge-APD in Visible-Near-Infrared Wide Spectrum with Light-Absorption-Enhanced Nanostructure.Photodetectors with broad spectral response and high responsivity demonstrate significant potential in optoelectronic applications. This study proposes a Si/Ge avalanche photodiode featuring nanostructures that enhance light absorption. By optimizing the device epitaxial structure and these nanostructures, a wide spectral responsivity from 0.4 to 1.6 μm is achieved. The results demonstrate that introducing surface photon-trapping nanoholes and SiO₂ reflective grating nanostructures increases the average light absorptivity from 0.64 to 0.84 in the 0.4-1.1 μm range and from 0.31 to 0.56 in the 1.1-1.6 μm range. At an applied bias of 0.95 V_br-apd, the responsivity reaches 17.24 A/W at 1.31 μm and 17.6 A/W at 1.55 μm. This research provides theoretical insights for design2025-01-01T00:00:00Z2025 Feb2025-04-03T23:32:28.568Z2025-04-03T23:32:28.568ZS-EPMC118589854000639510.3390/s25041167