{"database":"biostudies-literature","file_versions":[],"scores":null,"additional":{"submitter":["Li Y"],"funding":["National Natural Science Foundation of China (National Science Foundation of China)"],"pagination":["93"],"full_dataset_link":["https://www.ebi.ac.uk/biostudies/studies/S-EPMC12852827"],"repository":["biostudies-literature"],"omics_type":["Unknown"],"volume":["15(1)"],"pubmed_abstract":["Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is critical for advanced microfabrication but remains a major challenge. Conventional coherence scanning interferometry (CSI), while widely adopted, suffers from low signal-to-noise ratio (SNR) and limited lateral resolution when applied to HAR and composite microstructures. Here, we present Fourier ptychographic coherence scanning interferometry (FP-CSI), the first transmissive CSI modality that integrates the aperture synthesis strategy of Fourier ptychographic microscopy with the quantitative phase-resolved capability of interferometry. FP-CSI enables robust three-dimensional morphology reconstruction with enhanced SNR and improved lateral resolution, without reliance on iterative phase"],"journal":["Light, science & applications"],"pubmed_title":["Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches."],"pmcid":["PMC12852827"],"funding_grant_id":["62327814, 62175107, 62205148"],"pubmed_authors":["Li Y","Wang S","Yuan Q","Huo X","He H","Gao Z"],"additional_accession":[]},"is_claimable":false,"name":"Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches.","description":"Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is critical for advanced microfabrication but remains a major challenge. Conventional coherence scanning interferometry (CSI), while widely adopted, suffers from low signal-to-noise ratio (SNR) and limited lateral resolution when applied to HAR and composite microstructures. Here, we present Fourier ptychographic coherence scanning interferometry (FP-CSI), the first transmissive CSI modality that integrates the aperture synthesis strategy of Fourier ptychographic microscopy with the quantitative phase-resolved capability of interferometry. FP-CSI enables robust three-dimensional morphology reconstruction with enhanced SNR and improved lateral resolution, without reliance on iterative phase","dates":{"release":"2026-01-01T00:00:00Z","publication":"2026 Jan","modification":"2026-06-17T07:05:44.835Z","creation":"2026-06-17T03:10:24.449Z"},"accession":"S-EPMC12852827","cross_references":{"pubmed":["41605912"],"doi":["10.1038/s41377-026-02189-6"]}}