biostudies-literatureUnknown16(1)Kim EKScientific reports7110https://www.ebi.ac.uk/biostudies/studies/S-EPMC12920749biostudies-literatureMolecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures.PMC12920749Kim EKKim CHHong JWLim WSKim KLEoh HJPark JSJeon YWKim DWJeong JWKim SHKim JYPark YJYeom GYfalseMolecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures.2026-01-01T00:00:00Z2026 Feb2026-07-16T12:57:38.034Z2026-07-09T10:56:39.626ZS-EPMC129207494163432910.1038/s41598-026-38333-w