biostudies-literatureCui BNatural Science Foundation of Beijing Municipality (Beijing Natural Science Foundation)Natural Science Foundation of Beijing MunicipalityNational Natural Science Foundation of ChinaNational Natural Science Foundation of China (National Science Foundation of China)68https://www.ebi.ac.uk/biostudies/studies/S-EPMC12946372biostudies-literatureUnknown12(1)Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (<30 µV) was constructed for performance evaluation. Leveraging the exceptional Microsystems & nanoengineeringHigh sensitivity SAW hydrogen gas sensor based on thermal conductivity effect.PMC129463721252032U18372091240454312304530QY24359Liang YCheng LWang WHuang LJin JXue XCui BfalseHigh sensitivity SAW hydrogen gas sensor based on thermal conductivity effect.Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (<30 µV) was constructed for performance evaluation. Leveraging the exceptional 2026-01-01T00:00:00Z2026 Feb2026-07-16T22:25:48.389Z2026-07-11T03:12:08.535ZS-EPMC129463724174853310.1038/s41378-026-01199-z