biostudies-literatureLiu WNatural Science Foundation of Jiangxi ProvinceScience and Technology Commission of Shanghai MunicipalityMinistry of Science and Technology of the People's Republic of ChinaNatural Science Foundation of ShanghaiNational Natural Science Foundation of ChinaNational Science Foundation1700191https://www.ebi.ac.uk/biostudies/studies/S-EPMC5604371biostudies-literatureUnknown4(9)Precise patterning of biomaterials has widespread applications, including drug release, degradable implants, tissue engineering, and regenerative medicine. Patterning of protein-based microstructures using UV-photolithography has been demonstrated using protein as the resist material. The Achilles heel of existing protein-based biophotoresists is the inevitable wide molecular weight distribution during the protein extraction/regeneration process, hindering their practical uses in the semiconductor industry where reliability and repeatability are paramount. A wafer-scale high resolution patterning of bio-microstructures using well-defined silk fibroin light chain as the resist material is presented showing unprecedent performances. The lithographic and etching performance of silk fibroin liAdvanced science (Weinheim, Baden-Wurttemberg, Germany)Precise Protein Photolithography (P³): High Performance Biopatterning Using Silk Fibroin Light Chain as the Resist.PMC560437115634222016YFA020080061574156615278181452072040016JC1420100BK201605541562915Gilbert Corder SNZhang GKaplan DLLiu MOmenetto FGZhang SShi ZLiu WZhou ZLi XTabarini JTao THDong FZhang YCheng LLee WMao YfalsePrecise Protein Photolithography (P³): High Performance Biopatterning Using Silk Fibroin Light Chain as the Resist.Precise patterning of biomaterials has widespread applications, including drug release, degradable implants, tissue engineering, and regenerative medicine. Patterning of protein-based microstructures using UV-photolithography has been demonstrated using protein as the resist material. The Achilles heel of existing protein-based biophotoresists is the inevitable wide molecular weight distribution during the protein extraction/regeneration process, hindering their practical uses in the semiconductor industry where reliability and repeatability are paramount. A wafer-scale high resolution patterning of bio-microstructures using well-defined silk fibroin light chain as the resist material is presented showing unprecedent performances. The lithographic and etching performance of silk fibroin li2017-01-01T00:00:00Z2017 Sep2025-05-29T19:21:06.672Z2025-05-29T19:21:06.672ZS-EPMC56043712893267810.1002/advs.201700191