biostudies-literatureDory JBAgence Nationale de la RechercheConseil régional de Bourgogne-Franche-ComtéAgence Nationale de la Recherche (French National Research Agency)Conseil régional de Bourgogne-Franche-Comté (Regional Council of Burgundy)11894https://www.ebi.ac.uk/biostudies/studies/S-EPMC7367863biostudies-literatureUnknown10(1)Thanks to their unique optical properties Ge-Sb-S-Se-Te amorphous chalcogenide materials and compounds offer tremendous opportunities of applications, in particular in near and mid-infrared range. This spectral range is for instance of high interest for photonics or optical sensors. Using co-sputtering technique of chalcogenide compound targets in a 200 mm industrial deposition tool, we show how by modifying the amorphous structure of GeSb_wS_xSe_yTe_z chalcogenide thin films one can significantly tailor their linear and nonlinear optical properties. Modelling of spectroscopic ellipsometry data collected on the as-deposited chalcogenide thin films is used to evaluate their linear and nonlinear properties. Moreover, Raman and Fourier-transform infrareScientific reportsGe-Sb-S-Se-Te amorphous chalcogenide thin films towards on-chip nonlinear photonic devices.PMC7367863EIPHI Graduate School ANR-17-EURE-0002FEDER ProgramCastro-Chavarria CJager JBFedeli JMBernard MTessaire MDory JBCluzel BCoillet ANoe PVerdy ASabbione CfalseGe-Sb-S-Se-Te amorphous chalcogenide thin films towards on-chip nonlinear photonic devices.Thanks to their unique optical properties Ge-Sb-S-Se-Te amorphous chalcogenide materials and compounds offer tremendous opportunities of applications, in particular in near and mid-infrared range. This spectral range is for instance of high interest for photonics or optical sensors. Using co-sputtering technique of chalcogenide compound targets in a 200 mm industrial deposition tool, we show how by modifying the amorphous structure of GeSb_wS_xSe_yTe_z chalcogenide thin films one can significantly tailor their linear and nonlinear optical properties. Modelling of spectroscopic ellipsometry data collected on the as-deposited chalcogenide thin films is used to evaluate their linear and nonlinear properties. Moreover, Raman and Fourier-transform infrare2020-01-01T00:00:00Z2020 Jul2025-04-04T13:38:33.546Z2025-04-04T13:38:33.546ZS-EPMC73678633268114210.1038/s41598-020-67377-9