{"database":"biostudies-literature","file_versions":[],"scores":null,"additional":{"submitter":["Vishnevskiy AS"],"funding":["Ministry of Science and Higher Education of the Russian Federation","National Natural Science Foundation of China","Russian Foundation for Basic Research"],"pagination":["E4484"],"full_dataset_link":["https://www.ebi.ac.uk/biostudies/studies/S-EPMC7601386"],"repository":["biostudies-literature"],"omics_type":["Unknown"],"volume":["13(20)"],"pubmed_abstract":["Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft baking at 120-200 °C and curing at 430 °C. The films' porosity was controlled by using sacrificial template Brij® L4. Changes of the films' refractive indices, mechanical properties, k-values, porosity and pore structure versus chemical composition of the film's matrix are evaluated and compared with methyl-terminated low-k materials. The chemical resistance of the films to annealing in oxygen-containing atmosphere is evaluated by using density functional theory (DFT). It is found that the introdu"],"journal":["Materials (Basel, Switzerland)"],"pubmed_title":["Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate-Glass Films."],"pmcid":["PMC7601386"],"funding_grant_id":["61874002","18-52-52010","0706-2020-0022","18-29-27022"],"pubmed_authors":["Seregin DS","Vishnevskiy AS","Rasadujjaman M","Zhang J","Vorotilov KA","Naumov S","Baklanov MR","Leu J","Chuang WT","Wu YH"],"additional_accession":[]},"is_claimable":false,"name":"Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate-Glass Films.","description":"Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft baking at 120-200 °C and curing at 430 °C. The films' porosity was controlled by using sacrificial template Brij® L4. Changes of the films' refractive indices, mechanical properties, k-values, porosity and pore structure versus chemical composition of the film's matrix are evaluated and compared with methyl-terminated low-k materials. The chemical resistance of the films to annealing in oxygen-containing atmosphere is evaluated by using density functional theory (DFT). It is found that the introdu","dates":{"release":"2020-01-01T00:00:00Z","publication":"2020 Oct","modification":"2025-04-19T00:41:26.992Z","creation":"2020-11-03T08:05:15Z"},"accession":"S-EPMC7601386","cross_references":{"pubmed":["33050395"],"doi":["10.3390/ma13204484"]}}