biostudies-literatureDas MMinistry of Science and Technology, TaiwanChang Gung Medical Foundation13774-13782https://www.ebi.ac.uk/biostudies/studies/S-EPMC9074847biostudies-literatureUnknown12(22)pH monitoring in clinical assessment is pivotal as pH imbalance significantly influences the physiological and extracellular functions of the human body. Metal oxide based pH sensors, a promising alternative to bulky pH electrodes, mostly require complex fabrication, high-temperature post-deposition treatment, and high expenses that inhibit their practical applicability. So, there is still room to develop a straightforward and cost-effective metal oxide based pH sensor comprising high sensitivity and reliability. In this report, a novel solution-processed and low-temperature annealed (220 °C) mixed-valence (vii/vi) oxide of rhenium (Re _<i>x</i> O _<i>y</i> ) was applied in an electrolyte-insulator-semiconductor (EIS) structure. The annealing effect on morphological, stRSC advancesExcellent physicochemical and sensing characteristics of a Re _<i>x</i> O _<i>y</i> based pH sensor at low post-deposition annealing temperature.PMC9074847BMRPA00MOST 110-2221-E-182-032CMRPD2J0092CMRPD2H0182Chakraborty TLei KFKao CHDas MLin CYfalseExcellent physicochemical and sensing characteristics of a Re _<i>x</i> O _<i>y</i> based pH sensor at low post-deposition annealing temperature.pH monitoring in clinical assessment is pivotal as pH imbalance significantly influences the physiological and extracellular functions of the human body. Metal oxide based pH sensors, a promising alternative to bulky pH electrodes, mostly require complex fabrication, high-temperature post-deposition treatment, and high expenses that inhibit their practical applicability. So, there is still room to develop a straightforward and cost-effective metal oxide based pH sensor comprising high sensitivity and reliability. In this report, a novel solution-processed and low-temperature annealed (220 °C) mixed-valence (vii/vi) oxide of rhenium (Re _<i>x</i> O _<i>y</i> ) was applied in an electrolyte-insulator-semiconductor (EIS) structure. The annealing effect on morphological, st2022-01-01T00:00:00Z2022 May2026-05-10T00:48:57.789Z2025-02-19T04:21:25.809ZS-EPMC90748473553039110.1039/d2ra01177h