biostudies-literatureWu JChinese Academy of SciencesNational Natural Science Foundation of China5721-5727https://www.ebi.ac.uk/biostudies/studies/S-EPMC9078233biostudies-literatureUnknown8(11)Organic optoelectronic devices, especially for OLEDs, are extremely susceptibility to water vapor and oxygen which limit their widespread commercialization. In order to extend the shelf-lifetime of devices, thin film encapsulation is the most promising and challenging encapsulation process. In this study, dyad-style multilayer encapsulation structures based on alternating Al₂O₃ layer and parylene C have been discussed as gas diffusion barriers, in which dense and pinhole-free Al₂O₃ films were grown by atomic layer deposition (ALD) and flexible parylene C layers were deposited by chemical vapor deposition (CVD). We found the particle in ALD deposited Al₂O₃ films process is the key killer to barrier property. The thickness of RSC advancesEfficient multi-barrier thin film encapsulation of OLED using alternating Al₂O₃ and polymer layers.PMC9078233XDA09020201U1605244Wu JNie SZhang DWei CCui ZFei FChen XSu WfalseEfficient multi-barrier thin film encapsulation of OLED using alternating Al₂O₃ and polymer layers.Organic optoelectronic devices, especially for OLEDs, are extremely susceptibility to water vapor and oxygen which limit their widespread commercialization. In order to extend the shelf-lifetime of devices, thin film encapsulation is the most promising and challenging encapsulation process. In this study, dyad-style multilayer encapsulation structures based on alternating Al₂O₃ layer and parylene C have been discussed as gas diffusion barriers, in which dense and pinhole-free Al₂O₃ films were grown by atomic layer deposition (ALD) and flexible parylene C layers were deposited by chemical vapor deposition (CVD). We found the particle in ALD deposited Al₂O₃ films process is the key killer to barrier property. The thickness of 2018-01-01T00:00:00Z2018 Feb2025-04-19T10:45:48.702Z2024-11-14T03:45:04.582ZS-EPMC90782333553960510.1039/c8ra00023a