{"database":"biostudies-literature","file_versions":[],"scores":null,"additional":{"submitter":["Boyce AM"],"funding":["American Society for Engineering Education","Army Research Office","Air Force Office of Scientific Research","Office of Naval Research"],"pagination":["3525-3531"],"full_dataset_link":["https://www.ebi.ac.uk/biostudies/studies/S-EPMC9101075"],"repository":["biostudies-literature"],"omics_type":["Unknown"],"volume":["22(9)"],"pubmed_abstract":["Actively tunable optical materials integrated with engineered subwavelength structures could enable novel optoelectronic devices, including reconfigurable light sources and tunable on-chip spectral filters. The phase-change material vanadium dioxide (VO<sub>2</sub>) provides a promising solid-state solution for dynamic tuning; however, previous demonstrations have been limited to thicker and often rough VO<sub>2</sub> films or require a lattice-matched substrate for growth. Here, sub-10-nm-thick VO<sub>2</sub> films are realized by atomic layer deposition (ALD) and integrated with plasmonic nanogap cavities to demonstrate tunable, spectrally selective absorption across 1200 nm in the near-infrared (NIR). Upon inducing the phase transition via heating, the absorption resonance is blue-shifted by as much as 60 nm. This process is reversible upon cooling and repeatable over more than ten temperature cycles. Dynamic, ultrathin VO<sub>2</sub> films deposited by ALD, as demonstrated here, open up new potential architectures and applications where VO<sub>2</sub> can be utilized to provide reconfigurability including three-dimensional, flexible and large-area structures."],"journal":["Nano letters"],"pubmed_title":["Actively Tunable Metasurfaces via Plasmonic Nanogap Cavities with Sub-10-nm VO<sub>2</sub> Films."],"pmcid":["PMC9101075"],"funding_grant_id":["FA9550-18-1-0326","N00014-17-1-2589","W911NF1610471","FA9550-21-1-0312"],"pubmed_authors":["Boyce AM","Shen Q","Avila J","Wheeler VD","Zhang S","Stewart JW","Mikkelsen MH"],"additional_accession":[]},"is_claimable":false,"name":"Actively Tunable Metasurfaces via Plasmonic Nanogap Cavities with Sub-10-nm VO<sub>2</sub> Films.","description":"Actively tunable optical materials integrated with engineered subwavelength structures could enable novel optoelectronic devices, including reconfigurable light sources and tunable on-chip spectral filters. The phase-change material vanadium dioxide (VO<sub>2</sub>) provides a promising solid-state solution for dynamic tuning; however, previous demonstrations have been limited to thicker and often rough VO<sub>2</sub> films or require a lattice-matched substrate for growth. Here, sub-10-nm-thick VO<sub>2</sub> films are realized by atomic layer deposition (ALD) and integrated with plasmonic nanogap cavities to demonstrate tunable, spectrally selective absorption across 1200 nm in the near-infrared (NIR). Upon inducing the phase transition via heating, the absorption resonance is blue-shifted by as much as 60 nm. This process is reversible upon cooling and repeatable over more than ten temperature cycles. Dynamic, ultrathin VO<sub>2</sub> films deposited by ALD, as demonstrated here, open up new potential architectures and applications where VO<sub>2</sub> can be utilized to provide reconfigurability including three-dimensional, flexible and large-area structures.","dates":{"release":"2022-01-01T00:00:00Z","publication":"2022 May","modification":"2025-04-04T18:39:30.36Z","creation":"2025-02-19T00:55:51.205Z"},"accession":"S-EPMC9101075","cross_references":{"pubmed":["35472261"],"doi":["10.1021/acs.nanolett.1c04175"]}}