biostudies-literatureUnknown13(10)Teuschel MIn piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower power consumption and no additional need of a DC-DC converter for low AC driving voltages. This study investigates the potential of using piezoelectric layers with an imprint for stable bipolar operation on the basis of epitaxially grown lead zirconate titanate cantilevers with electrodes made of a metal and metal oxide stack. Due to the manufacturing process, the samples exhibit high crystallinity, rectangular shaped hysteresis and a high piezoelectric response. Furthermore, the piezoelectric lMicromachines1705https://www.ebi.ac.uk/biostudies/studies/S-EPMC9606857biostudies-literatureTemperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation.PMC9606857Novotny CRusconi Clerici AHeyes PHorvath STeuschel MfalseTemperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation.In piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower power consumption and no additional need of a DC-DC converter for low AC driving voltages. This study investigates the potential of using piezoelectric layers with an imprint for stable bipolar operation on the basis of epitaxially grown lead zirconate titanate cantilevers with electrodes made of a metal and metal oxide stack. Due to the manufacturing process, the samples exhibit high crystallinity, rectangular shaped hysteresis and a high piezoelectric response. Furthermore, the piezoelectric l2022-01-01T00:00:00Z2022 Oct2025-04-04T11:29:06.291Z2025-04-04T11:29:06.291ZS-EPMC96068573629605810.3390/mi13101705