biostudies-literatureUnknown24(1)Ashida YVanadium dioxide (VO₂) material, known for changing physical properties due to metal-insulator transition (MIT) near room temperature, has been reported to undergo a phase change depending on the strain. This fact can be a significant problem for nanoscale devices in VO₂, where the strain field covers a large area fraction, spatially non-uniform, and the amount of strain can vary during the MIT process. Direct measurement of the strain field distribution during MIT is expected to establish a methodology for material phase identification. We have demonstrated the effectiveness of geometric phase analysis (GPA), high-resolution transmission electron microscopy techniques, and transmission electron diffraction (TED). The GPA images show that the nanoregions of interest aScience and technology of advanced materials1-9https://www.ebi.ac.uk/biostudies/studies/S-EPMC9793943biostudies-literatureQuantitative spatial mapping of distorted state phases during the metal-insulator phase transition for nanoscale VO₂ engineering.PMC9793943Naruse NIshibe TYang JNakamura YAshida YfalseQuantitative spatial mapping of distorted state phases during the metal-insulator phase transition for nanoscale VO₂ engineering.Vanadium dioxide (VO₂) material, known for changing physical properties due to metal-insulator transition (MIT) near room temperature, has been reported to undergo a phase change depending on the strain. This fact can be a significant problem for nanoscale devices in VO₂, where the strain field covers a large area fraction, spatially non-uniform, and the amount of strain can vary during the MIT process. Direct measurement of the strain field distribution during MIT is expected to establish a methodology for material phase identification. We have demonstrated the effectiveness of geometric phase analysis (GPA), high-resolution transmission electron microscopy techniques, and transmission electron diffraction (TED). The GPA images show that the nanoregions of interest a2023-01-01T00:00:00Z20232025-04-04T14:10:46.299Z2025-04-04T14:10:46.299ZS-EPMC97939433658309510.1080/14686996.2022.2150525