biostudies-literatureYang WFoundation from Department of Science and Technology of Fujian ProvinceFoundation from Key project of Hangzhou Polytechnic of Science and TechnologyNational Key R&D Program of ChinaShanghai Municipal Natural Science FoundationNational Key R&D Program of ChinaZhejiang Provincial Natural Science Foundation of ChinaScientific Research Foundation from Jimei UniversityNational Natural Science Foundation of ChinaKey Research and Development Plan Project of Zhejiang ProvinceTalent Project of Zhejiang Province13https://www.ebi.ac.uk/biostudies/studies/S-EPMC9935800biostudies-literatureUnknown18(1)Large-area, continuous monolayer WS₂ exhibits great potential for future micro-nanodevice applications due to its special electrical properties and mechanical flexibility. In this work, the front opening quartz boat is used to increase the amount of sulfur (S) vapor under the sapphire substrate, which is critical for achieving large-area films during the chemical vapor deposition processes. COMSOL simulations reveal that the front opening quartz boat will significantly introduce gas distribute under the sapphire substrate. Moreover, the gas velocity and height of substrate away from the tube bottom will also affect the substrate temperature. By carefully optimizing the gas velocity, temperature, and height of substrate away from the tube bottom, a large-scale continues monolayerNanoscale research lettersCVD growth of large-area monolayer WS₂ film on sapphire through tuning substrate environment and its application for high-sensitive strain sensor.PMC9935800HKYZXZD-2022-1No. 6118711672018C010362020J017042018YFA07037002019C04003No. LGG19F040003ZP2020065No. 6170404020ZR14032002021R52009Li JMu YChen JShang JDong LXuan WWang GCong CSong JYang WHe SZhou CJin NChen XLiu CfalseCVD growth of large-area monolayer WS₂ film on sapphire through tuning substrate environment and its application for high-sensitive strain sensor.Large-area, continuous monolayer WS₂ exhibits great potential for future micro-nanodevice applications due to its special electrical properties and mechanical flexibility. In this work, the front opening quartz boat is used to increase the amount of sulfur (S) vapor under the sapphire substrate, which is critical for achieving large-area films during the chemical vapor deposition processes. COMSOL simulations reveal that the front opening quartz boat will significantly introduce gas distribute under the sapphire substrate. Moreover, the gas velocity and height of substrate away from the tube bottom will also affect the substrate temperature. By carefully optimizing the gas velocity, temperature, and height of substrate away from the tube bottom, a large-scale continues monolayer2023-01-01T00:00:00Z2023 Feb2025-04-22T08:46:29.876Z2024-10-18T14:45:01.778ZS-EPMC99358003679519310.1186/s11671-023-03782-z