Efficiency Improvement of Industrial Silicon Solar Cells by the POCl₃ Diffusion Process.

ABSTRACT: To improve the efficiency of polycrystalline silicon solar cells, process optimization is a key technology in the photovoltaic industry. Despite the efficiency of this technique to be reproducible, economic, and simple, it presents a major inconvenience to have a heavily doped region near the surface which induces a high minority carrier recombination. To limit this effect, an optimization of diffused phosphorous profiles is required. A "low-high-low" temperature step of the POCl₃ diffusion process was developed to improve the efficiency of industrial-type polycrystalline silicon solar cells. The low surface concentration of phosphorus doping of 4.54 × 10²⁰ atoms/cm³ and junction depth of 0.31 μm at a dopant concentration of N = 10¹⁷ atoms

SUBMITTER: Xu X 

PROVIDER: S-EPMC10003932 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature