Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN.

ABSTRACT: The piezoelectric and elastic properties are critical for the performance of AlN-based 5G RF filters. The improvement of the piezoelectric response in AlN is often accompanied by lattice softening, which compromises the elastic modulus and sound velocities. Optimizing both the piezoelectric and elastic properties simultaneously is both challenging and practically desirable. In this work, 117 X_0.125Y_0.125Al_0.75N compounds were studied with the high-throughput first-principles calculation. B_0.125Er_0.125Al_0.75N, Mg_0.125Ti_0.125Al_0.75N, and Be_0.125Ce_0.125Al_0.75N were found to have both high C₃₃ (>249.592 GPa) and high e₃₃ (>1.869

SUBMITTER: Yu X 

PROVIDER: S-EPMC10004460 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature