A Self-Powered High-Responsivity, Fast-Response-Speed Solar-Blind Ultraviolet Photodetector Based on CuO/β-Ga₂O₃ Heterojunction with Built-In Potential Control.

ABSTRACT: Controlling built-in potential can enhance the photoresponse performance of self-powered photodetectors. Among the methods for controlling the built-in potential of self-powered devices, postannealing is simpler, more efficient, and less expensive than ion doping and alternative material research. In this study, a CuO film was deposited on a β-Ga₂O₃ epitaxial layer via reactive sputtering with an FTS system, and a self-powered solar-blind photodetector was fabricated through a CuO/β-Ga₂O₃ heterojunction and postannealed at different temperatures. The postannealing process reduced the defects and dislocations at the interface between each layer and affected the electrical and structural properties of the CuO film. After postannealing at 300 °C, th

SUBMITTER: Park S 

PROVIDER: S-EPMC10005126 | biostudies-literature | 2023 Mar

REPOSITORIES: biostudies-literature