Tuning the Liquid-Vapour Interface of VLS Epitaxy for Creating Novel Semiconductor Nanostructures.

ABSTRACT: Controlling the morphology and composition of semiconductor nano- and micro-structures is crucial for fundamental studies and applications. Here, Si-Ge semiconductor nanostructures were fabricated using photolithographically defined micro-crucibles on Si substrates. Interestingly, the nanostructure morphology and composition of these structures are strongly dependent on the size of the liquid-vapour interface (i.e., the opening of the micro-crucible) in the CVD deposition step of Ge. In particular, Ge crystallites nucleate in micro-crucibles with larger opening sizes (3.74-4.73 μm²), while no such crystallites are found in micro-crucibles with smaller openings of 1.15 μm². This interface area tuning also results in the formation of unique semiconductor nanostructures:

SUBMITTER: Suwito GR 

PROVIDER: S-EPMC10005286 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature