A Reflectivity Enhanced 3D Optical Storage Nanostructure Application Based on Direct Laser Writing Lithography.

ABSTRACT: To enable high-density optical storage, better storage media structures, diversified recording methods, and improved accuracy of readout schemes should be considered. In this study, we propose a novel three-dimensional (3D) sloppy nanostructure as the optical storage device, and this nanostructure can be fabricated using the 3D laser direct writing technology. It is a 900 nm high, 1 × 2 µm wide Si slope on a 200 nm SiO2 layer with 200 nm Si₃N₄ deposited on top to enhance reflectivity. In this study, we propose a reflected spectrum-based method as the readout recording strategy to stabilize information readout more stable. The corresponding reflected spectrum varied when the side wall angle of the slope and the azimuth angle of the nanostructure were tuned. In addition

SUBMITTER: Song L 

PROVIDER: S-EPMC10095977 | biostudies-literature | 2023 Mar

REPOSITORIES: biostudies-literature