Nanoscale temperature sensing of electronic devices with calibrated scanning thermal microscopy.

ABSTRACT: Heat dissipation threatens the performance and lifetime of many electronic devices. As the size of devices shrinks to the nanoscale, we require spatially and thermally resolved thermometry to observe their fine thermal features. Scanning thermal microscopy (SThM) has proven to be a versatile measurement tool for characterizing the temperature at the surface of devices with nanoscale resolution. SThM can obtain qualitative thermal maps of a device using an operating principle based on a heat exchange process between a thermo-sensitive probe and the sample surface. However, the quantification of these thermal features is one of the most challenging parts of this technique. Developing reliable calibration approaches for SThM is therefore an essential aspect to accurately determine the tempera

SUBMITTER: Swoboda T 

PROVIDER: S-EPMC10099078 | biostudies-literature | 2023 Apr

REPOSITORIES: biostudies-literature