Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications.

ABSTRACT: This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect

SUBMITTER: Jung SI 

PROVIDER: S-EPMC10133308 | biostudies-literature | 2023 Apr

REPOSITORIES: biostudies-literature