Influence of Annealing on Mechanical Behavior of Alumina-Tantala Nanolaminates.

ABSTRACT: Mechanical properties of thin films are significant for the applicability of nanodevices. Amorphous Al₂O₃-Ta₂O₅ double and triple layers were atomic layer-deposited to the thickness of 70 nm with constituent single-layer thicknesses varying from 40 to 23 nm. The sequence of layers was alternated and rapid thermal annealing (700 and 800 °C) was implemented on all deposited nanolaminates. Annealing caused changes in the microstructure of laminates dependent on their layered structure. Various shapes of crystalline grains of orthorhombic Ta₂O₅ were formed. Annealing at 800 °C resulted in hardening up to 16 GPa (~11 GPa prior to annealing) in double-layered laminate with top Ta₂O₅ and bottom Al₂O

SUBMITTER: Piirsoo HM 

PROVIDER: S-EPMC10143553 | biostudies-literature | 2023 Apr

REPOSITORIES: biostudies-literature