Isotopically Enriched Layers for Quantum Computers Formed by ²⁸Si Implantation and Layer Exchange.

ABSTRACT: ²⁸Si enrichment is crucial for production of group IV semiconductor-based quantum computers. Cryogenically cooled, monocrystalline ²⁸Si is a spin-free, vacuum-like environment where qubits are protected from sources of decoherence that cause loss of quantum information. Currently, ²⁸Si enrichment techniques rely on deposition of centrifuged SiF₄ gas, the source of which is not widely available, or bespoke ion implantation methods. Previously, conventional ion implantation into ^naturalSi substrates has produced heavily oxidized ²⁸Si layers. Here we report on a novel enrichment process involving ion implantation of ²⁸Si into Al films deposited on native-oxide free Si substrates followed by layer exchange crystalliza

SUBMITTER: Schneider E 

PROVIDER: S-EPMC10165600 | biostudies-literature | 2023 May

REPOSITORIES: biostudies-literature