A Sensitivity-Optimized Flexible Capacitive Pressure Sensor with Cylindrical Ladder Microstructural Dielectric Layers.

ABSTRACT: Flexible capacitive pressure sensors have attracted extensive attention due to their dynamic response and good sensing capability for static and small pressures. Using microstructural dielectric layers is an effective method for improving performance. However, the current state of microstructure design is primarily focused on basic shapes and is largely limited by simulation results; there is still a great deal of potential for further innovation and improvement. This paper innovatively proposes to increase the ladder structure based on the basic microstructures, for example, the long micro-ridge ladder, the cuboid ladder, and cylindrical ladder microstructures. By comparing 9 kinds of microstructures including ladder structure through finite element simulation, it is found that the sensor

SUBMITTER: Hua T 

PROVIDER: S-EPMC10181647 | biostudies-literature | 2023 Apr

REPOSITORIES: biostudies-literature