A fluid model of pulsed direct current planar magnetron discharge.

ABSTRACT: We simulated a pulsed direct current (DC) planar magnetron discharge using fluid model, solving for species continuity, momentum, and energy transfer equations, coupled with Poisson equation and Lorentz force for electromagnetism. Based on a validated DC magnetron model, an asymmetric bipolar potential waveform is applied at the cathode at 50-200 kHz frequency and 50-80% duty cycle. Our results show that pulsing leads to increased electron density and electron temperature, but decreased deposition rate over non-pulsed DC magnetron, trends consistent with those reported by experimental studies. Increasing pulse frequency increases electron temperature but reduces the electron density and deposition rate, whereas increasing duty cycle decreases both electron temperature and density but incre

SUBMITTER: Tran SBQ 

PROVIDER: S-EPMC10239496 | biostudies-literature | 2023 Jun

REPOSITORIES: biostudies-literature