N-Doped Graphene-like Film/Silicon Structures as Micro-Capacitor Electrodes.

ABSTRACT: Currently, the miniaturization of portable and autonomous devices is challenging for modern electronics. Graphene-based materials have recently emerged as one of the ideal candidates for supercapacitor electrodes, while Si is a common platform for direct component-on-chip integration. We have proposed the direct liquid-based CVD of N-doped graphene-like films (N-GLFs) on Si as a promising way to achieve solid-state on-chip micro-capacitor performance. Synthesis temperatures in the range from 800 °C to 1000 °C are investigated. Capacitances and electrochemical stability of the films are evaluated using cyclic voltammetry, as well as galvanostatic measurements and electrochemical impedance spectroscopy in 0.5 M Na₂SO₄. We have shown that N-doping is an efficient way to

SUBMITTER: Sedlovets DM 

PROVIDER: S-EPMC10254910 | biostudies-literature | 2023 May

REPOSITORIES: biostudies-literature