A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform.

ABSTRACT: The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO₃ electro-optic devices. Yet to date, LiNbO₃ photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partially etched waveguides, that lack the reproducibility achieved in silicon photonics. Widespread application of thin-film LiNbO₃ requires a reliable solution with precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO₃ photonic platform employing wafer-scale bonding of thin-film LiNbO₃ to silicon nitride (Si₃N₄) photonic integrated circuits. The platform maintains the low propagation loss (<0.1 dB/

SUBMITTER: Churaev M 

PROVIDER: S-EPMC10264395 | biostudies-literature | 2023 Jun

REPOSITORIES: biostudies-literature