Facile Fabrication of High-Performance Thermochromic VO₂-Based Films on Si for Application in Phase-Change Devices.

ABSTRACT: This work reports on an alternative and advantageous procedure to attain VO₂-based thermochromic coatings on silicon substrates. It involves the sputtering of vanadium thin films at glancing angles and their subsequent fast annealing in an air atmosphere. By adjusting thickness and porosity of films as well as the thermal treatment parameters, high VO₂(M) yields were achieved for 100, 200, and 300 nm thick layers treated at 475 and 550 °C for reaction times below 120 s. Comprehensive structural and compositional characterization by Raman spectroscopy, X-ray diffraction, and scanning-transmission electron microscopies combined with analytical techniques such as electron energy-loss spectroscopy bring to the fore the successful synthesis of VO₂(M) + V_2</

SUBMITTER: Santos AJ 

PROVIDER: S-EPMC10268973 | biostudies-literature | 2023 Jun

REPOSITORIES: biostudies-literature