Ontology highlight
ABSTRACT:
SUBMITTER: Sitek J
PROVIDER: S-EPMC10360032 | biostudies-literature | 2023 Jul
REPOSITORIES: biostudies-literature
ACS applied materials & interfaces 20230707 28
Van der Waals heterostructures (vdWHSs) enable the fabrication of complex electronic devices based on two-dimensional (2D) materials. Ideally, these vdWHSs should be fabricated in a scalable and repeatable way and only in the specific areas of the substrate to lower the number of technological operations inducing defects and impurities. Here, we present a method of selective fabrication of vdWHSs via chemical vapor deposition by electron-beam (EB) irradiation. We distinguish two growth modes: po ...[more]