High-quality superconducting α-Ta film sputtered on the heated silicon substrate.

ABSTRACT: Intrigued by the discovery of the long lifetime in the α-Ta/Al₂O₃-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method is to grow α-Ta film on a silicon substrate compatible with industrial manufacturing. Here we report the α-Ta film sputter-grown on Si (100) with a low-loss superconducting TiN_x buffer layer. The α-Ta film with a large growth temperature window has a good crystalline character. The superconducting critical transition temperature (T_c) and residual resistivity ratio (RRR) in the α-Ta film grown at 500 °C are higher than that in the α-Ta film grown at room te

SUBMITTER: Wu Y 

PROVIDER: S-EPMC10406942 | biostudies-literature | 2023 Aug

REPOSITORIES: biostudies-literature