Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition.

ABSTRACT: Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID). However, such an approach is unsuitable if the sample under study is sensitive to the somewhat aggressive exposure to the ion beam, which induces the effects of surface amorphization, local milling, and ion implantation, among others. An alternative strategy is that of focused electron beam induced deposition (FEBID), which makes use of a focused electron beam instead, and in general yields deposits with much lower metallic content than their FIBID counterparts. Methods: In this work, we optimize the deposition of tungsten-carbon (W-C) nanowires by FEBID to be used as electrical cont

SUBMITTER: Orus P 

PROVIDER: S-EPMC10446045 | biostudies-literature | 2022

REPOSITORIES: biostudies-literature