Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based on InGaZnO.

ABSTRACT: A full integration of miniaturized transparent energy device (lithium-ion battery), electronic device (thin-film transistor) and sensing device (photodetector) to form a monolithic integrated microsystem greatly enhances the functions of transparent electronics. Here, InGaZnO is explored to prepare the above devices and microsystem due to its multifunctional properties. A transparent lithium-ion battery with InGaZnO as anode (capacity~9.8 μAh cm^-2) is proposed as the on-chip power source. Then, thin-film transistor with InGaZnO as channel (mobility~23.3 cm² V^-1 s^-1) and photodetector with InGaZnO as photosensitive layer (responsivity~0.35 A W^-1) are also prepared on the substrate for constructing an fully integrated transparent microsy

SUBMITTER: Jia B 

PROVIDER: S-EPMC10474284 | biostudies-literature | 2023 Sep

REPOSITORIES: biostudies-literature