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Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS.

ABSTRACT: This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS₂@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25-700 °C, 0-700 kPa, and 10-98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.

SUBMITTER: Liang X

PROVIDER: S-EPMC10493225 | biostudies-literature | 2023

REPOSITORIES: biostudies-literature

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Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS.

Liang Xiaorui X Zhang Lei L Tan Qiulin Q Cheng Wenhua W Hu Dan D Li Shuang S Jing Lin L Xiong Jijun J

Microsystems & nanoengineering 20230911

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS<sub>2</sub>@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to ...[more]

PMID: 37701521

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