Nature of GaO_x Shells Grown on Silica by Atomic Layer Deposition.

ABSTRACT: Gallia-based shells with a thickness varying from a submonolayer to ca. 2.5 nm were prepared by atomic layer deposition (ALD) using trimethylgallium, ozone, and partially dehydroxylated silica, followed by calcination at 500 °C. Insight into the atomic-scale structure of these shells was obtained by high-field ⁷¹Ga solid-state nuclear magnetic resonance (NMR) experiments and the modeling of X-ray differential pair distribution function data, complemented by Ga K-edge X-ray absorption spectroscopy and ²⁹Si dynamic nuclear polarization surface enhanced NMR spectroscopy (DNP SENS) studies. When applying one ALD cycle, the grown submonolayer contains mostly tetracoordinate Ga sites with Si atoms in the second coordination sphere (^[4]Ga_(Si)) and, acco

SUBMITTER: Chen Z 

PROVIDER: S-EPMC10536998 | biostudies-literature | 2023 Sep

REPOSITORIES: biostudies-literature