Strategy to simulate and fit 2D grazing-incidence small-angle X-ray scattering patterns of nanostructured thin films.

ABSTRACT: Grazing-incidence small-angle X-ray scattering (GISAXS) is a widely used method for the characterization of the nanostructure of supported thin films and enables time-resolved in situ measurements. The 2D scattering patterns contain detailed information about the nanostructures within the film and at its surface. However, this information is distorted not only by the reflection of the X-ray beam at the substrate-film interface and its refraction at the film surface but also by scattering of the substrate, the sample holder and other types of parasitic background scattering. In this work, a new, efficient strategy to simulate and fit 2D GISAXS patterns that explicitly includes these effects is introduced and demonstrated for (i) a model case nanostructured thin film on a substrate an

SUBMITTER: Jung FA 

PROVIDER: S-EPMC10543672 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature