Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning.

ABSTRACT: Scanning probe lithography (SPL) is a promising technology to fabricate high-resolution, customized and cost-effective features at the nanoscale. However, the quality of nano-fabrication, particularly the critical dimension, is significantly influenced by various SPL fabrication techniques and their corresponding process parameters. Meanwhile, the identification and measurement of nano-fabrication features are very time-consuming and subjective. To tackle these challenges, we propose a novel framework for process parameter optimization and feature segmentation of SPL via machine learning (ML). Different from traditional SPL techniques that rely on manual labeling-based experimental methods, the proposed framework intelligently extracts reliable and global information for statistical analys

SUBMITTER: Liu Y 

PROVIDER: S-EPMC10564742 | biostudies-literature | 2023

REPOSITORIES: biostudies-literature