Supported MOCVD TiO₂ Thin Films Grown on Modified Stainless Steel Mesh for Sensing Applications.

ABSTRACT: Among semiconductor metal oxides, that are an important class of sensing materials, titanium dioxide (TiO₂) thin films are widely employed as sensors because of their high chemical and mechanical stability in harsh environments, non-toxicity, eco-compatibility, and photocatalytic properties. TiO₂-based chemical oxygen demand (COD) sensors exploit the photocatalytic properties of TiO₂ in inducing the oxidation of organic compounds to CO₂. In this work, we discuss nanostructured TiO₂ thin films grown via low-pressure metal organic chemical vapor deposition (MOCVD) on metallic AISI 316 mesh. To increase the surface sensing area, different inorganic acid-based chemical etching protocols have been developed, determining the optimal experime

SUBMITTER: El Habra N 

PROVIDER: S-EPMC10574371 | biostudies-literature | 2023 Sep

REPOSITORIES: biostudies-literature