The Real-Time Monitoring of the Laser-Induced Functionalization of Transparent Conductive Oxide Films.

ABSTRACT: Laser-induced functionalization using excimer laser irradiation has been widely applied to transparent conductive oxide films. However, exploring suitable irradiation conditions is time-consuming and cost-ineffective as there are numerous routine film fabrication and analytical processes. Thus, we herein explored a real-time monitoring technique of the laser-induced functionalization of transparent conductive oxide films. We developed two types of monitoring apparatus, electrical and optical, and applied them to magnetron-sputtered, Sn-doped In₂O₃ films grown on glass substrates and hydrogen-doped In₂O₃ films on glass or plastic substrates using a picosecond Nd:YAG pulsed laser. Both techniques could monitor the functionalization from a change in

SUBMITTER: Hosokai T 

PROVIDER: S-EPMC10574555 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature