High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature.

ABSTRACT: Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second- and third-order nonlinearities, and broad transparency window in the visible and near-infrared range. However, integrating silicon carbide (SiC) has been difficult, and current approaches rely on transfer bonding techniques that are time-consuming, expensive, and lacking precision in layer thickness. Here, we demonstrate high-index amorphous s

SUBMITTER: Lopez-Rodriguez B 

PROVIDER: S-EPMC10588551 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature