Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions.

ABSTRACT: Femtosecond-laser-assisted material restructuring employs extreme optical intensities to localize the ablation regions. To overcome the minimum feature size limit set by the wave nature of photons, there is a need for new approaches to tailored material processing at the nanoscale. Here, we report the formation of deeply-subwavelength features in silicon, enabled by localized laser-induced phase explosions in prefabricated silicon resonators. Using short trains of mid-infrared laser pulses, we demonstrate the controllable formation of high aspect ratio (>10:1) nanotrenches as narrow as [Formula: see text]. The trench geometry is shown to be scalable with wavelength, and controlled by multiple parameters of the laser pulse train, such as the intensity and polarization of each laser pulse an

SUBMITTER: Shcherbakov MR 

PROVIDER: S-EPMC10590427 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature