Vacuum Tunneling Transistor with Nano Vacuum Chamber for Harsh Environments.

ABSTRACT: A nano vacuum tube which consists of a vacuum transistor and a nano vacuum chamber was demonstrated. For the device, a vacuum region is an electron transport channel, and a vacuum is a tunneling barrier. Tilted angle evaporation was studied for the formation of the nano level vacuum chamber structure. This vacuum tube was ultraminiaturized with several tens of 10^-18 L scale volume and 10^-6 Torr of pressure. The device structure made it possible to achieve a high integration density and to sustain the vacuum state in various real operations. In particular, the vacuum transistor performed stably in extreme external environments because the tunneling mechanism showed a wide range of working stability. The vacuum was sustained well by the sealing layer and provided a defe

SUBMITTER: Heo SJ 

PROVIDER: S-EPMC10604106 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature