Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration.

ABSTRACT: A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor deposition (MOCVD)-grown GaN-on-Si epiwafer and AlGaInP red micro-LED arrays are both monolithically fabricated, followed by the integration with a common complementary metal oxide semiconductor (CMOS) backplane via flip-chip bonding technology to form a double-layer thin-film display structure. Full-color images with decent color gamut and brightness are successfully displayed through the fine adjustment of driving current densities of RGB subpixels. This full-color display combines the advanta

SUBMITTER: Qi L 

PROVIDER: S-EPMC10613616 | biostudies-literature | 2023 Oct

REPOSITORIES: biostudies-literature