Enhanced Thermal Conductivity of Free-Standing Double-Walled Carbon Nanotube Networks.

ABSTRACT: Nanomaterials are driving advances in technology due to their oftentimes superior properties over bulk materials. In particular, their thermal properties become increasingly important as efficient heat dissipation is required to realize high-performance electronic devices, reduce energy consumption, and prevent thermal damage. One application where nanomaterials can play a crucial role is extreme ultraviolet (EUV) lithography, where pellicles that protect the photomask from particle contamination have to be transparent to EUV light, mechanically strong, and thermally conductive in order to withstand the heat associated with high-power EUV radiation. Free-standing carbon nanotube (CNT) films have emerged as candidates due to their high EUV transparency and ability to withstand heat. However

SUBMITTER: Mehew JD 

PROVIDER: S-EPMC10636713 | biostudies-literature | 2023 Nov

REPOSITORIES: biostudies-literature