Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance.

ABSTRACT: In this study, we fabricated four different structures using single crystal silicon wafers for surface-enhanced Raman spectroscopy (SERS) applications. For single crystal silicon, different crystal orientations exhibit different physical and chemical properties. In chemical etching, the etching speed of different crystal planes also exhibits significant differences. We first used reactive ion etching (RIE) to process the surface of the substrate, and subsequently used KOH anisotropic wet etching technology to modify the surface of silicon wafers with different crystal orientations and produced four different results. In the RIE stage in an O₂ atmosphere, the (110) silicon wafer formed a hexagonal hole structure, and the (100) silicon wafer formed an inverted pyramid hole structu

SUBMITTER: Song J 

PROVIDER: S-EPMC10652251 | biostudies-literature | 2023 Nov

REPOSITORIES: biostudies-literature