Single-lens dynamic z-scanning for simultaneous in situ position detection and laser processing focus control.

ABSTRACT: Existing auto-focusing methods in laser processing typically include two independent modules, one for surface detection and another for z-axis adjustment. The latter is mostly implemented by mechanical z stage motion, which is up to three orders of magnitude slower than the lateral processing speed. To alleviate this processing bottleneck, we developed a single-lens approach, using only one high-speed z-scanning optical element, to accomplish both in situ surface detection and focus control quasi-simultaneously in a dual-beam setup. The probing beam scans the surface along the z-axis continuously, and its reflection is detected by a set of confocal optics. Based on the temporal response of the detected signal, we have developed and experimentally demonstrated a dynamic surface detection me

SUBMITTER: Du X 

PROVIDER: S-EPMC10656504 | biostudies-literature | 2023 Nov

REPOSITORIES: biostudies-literature