Roll-to-plate 0.1-second shear-rolling process at elevated temperature for highly aligned nanopatterns.

ABSTRACT: The shear-rolling process is a promising directed self-assembly method that can produce high-quality sub-10 nm block copolymer line-space patterns cost-effectively and straightforwardly over a large area. This study presents a high temperature (280 °C) and rapid (~0.1 s) shear-rolling process that can achieve a high degree of orientation in a single process while effectively preventing film delamination, that can be applied to large-area continuous processes. By minimizing adhesion, normal forces, and ultimate shear strain of the polydimethylsiloxane pad, shearing was successfully performed without peeling up to 280 °C at which the chain mobility significantly increases. This method can be utilized for various high-χ block copolymers and surface neutralization processes. It enables the cre

SUBMITTER: Cho J 

PROVIDER: S-EPMC10728125 | biostudies-literature | 2023 Dec

REPOSITORIES: biostudies-literature