Hybrid Metrology for Nanostructured Optical Metasurfaces.

ABSTRACT: Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltratio

SUBMITTER: Murataj I 

PROVIDER: S-EPMC10739581 | biostudies-literature | 2023 Dec

REPOSITORIES: biostudies-literature